Using Dynamic Voltage Drive in a Parallel-Plate Electrostatic Actuator for Full-Gap Travel Range and Positioning
نویسندگان
چکیده
منابع مشابه
Full-range Dynamic Positioning of Parallel-plate Electrostatic Actuators
⎯ The nonlinear dynamics of a parallel-plate electrostatically driven microstructure has been investigated. Simulations and experimental results on devices fabricated in an epi-poly process confirm that instability is avoided by a timely reversal of the rate of change of the drive voltage. A 5.5V peak sine wave with frequency higher than 300 Hz allows repetitive microstructure motion up to 70% ...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2006
ISSN: 1057-7157
DOI: 10.1109/jmems.2005.859099